Ion implantation is a complex and sensitive process and is used in the manufacture of semiconductors. For successful operation, beam purity and process stability are important. Here, graphite parts play a critical role. On the whole, the total cost of maintaining the system can be reduced when conventional materials are substituted with higher quality materials and process specific alloys. Graphite is mainly utilized in ion implanter beamlines. The thermal, chemical, electrical, and mechanical properties of these materials are essential in improving the service life of the system.
Materials experts at Zikusu – Lion Technical Solution have more than forty years of expertise in the field graphite and ion implantation processes. At Lion Technical Solution, we use purified specialty graphite with ultra-fine particle size to produce graphite components for Ion implantation. Any size and shape can be customized. We can produce according to drawing from customers.
